Deposition and etching
Results from our 3D simulation of
the evolution of chip features
(edges and corners) during the
manufacturing process.
Our initial geometry:
a square hole (shown right).
Non-isotropic etching.
Deposition with resputtering,
the instant of void creation.
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Square hole (top view)
Post-Etching (top view)
Post-sputtering (bottom view)
Other Research Projects